Problem wbmiscres SNF 2012-12-06 07:35:00: Litho SRD
gsosa at snf.stanford.edu
gsosa at snf.stanford.edu
Sun Dec 23 09:32:39 PST 2012
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Comment wbmiscres SNF 2012-11-27 12:32:52: not spinning initially
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Problem wbmiscres SNF 2012-12-06 07:35:00: Litho SRD
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New SRD broke a wafer on 12/1. SRD is under observation
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Comment wbmiscres SNF 2012-11-27 12:32:52: not spinning initially
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Problem wbmiscres SNF 2012-12-06 07:35:00: Litho SRD
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