From latta at snf.stanford.edu Wed Aug 8 02:06:27 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 8, 2001 2:06:27 PM Subject: Problem wbnitride 2001-08-08 14:06:26: Several problems w/ nitride etch bath... Message-ID: 1) the little low liquid sensor hose sticks out into the middle of the bath, which means the cassettes get caught on it 2) requested temp was 155C, but it never got above 141C 3) the Di water 'adder' hose is not working; DI is not getting added to the bath when it reaches temp. I tried to adjust the flowmeter, but it seemed to have no effect, even when I used the DI check option.... From uli at snf.stanford.edu Fri Aug 24 11:11:36 2001 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Aug 24, 2001 11:11:36 AM Subject: Shutdown wbnitride 2001-08-24 11:11:35: DI dripper off Message-ID: