From latta at snf.stanford.edu  Mon Sep 17 10:59:44 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Sep 17, 2001 10:59:44 AM
Subject: Shutdown wbnitride 2001-08-24 11:11:35: DI dripper off
Message-ID: <mailman.14.1356283965.5313.wbnitride-pcs@snf.stanford.edu>

Dripper being tested by staff and a user.



From latta at snf.stanford.edu  Mon Sep 17 10:59:57 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Sep 17, 2001 10:59:57 AM
Subject: Problem wbnitride 2001-08-08 14:06:26: Several problems w/ nitride etch bath...
Message-ID: <mailman.15.1356283965.5313.wbnitride-pcs@snf.stanford.edu>

All problem resolved...



From cmfaulkn at snf.stanford.edu  Fri Sep 21 08:12:37 2001
From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu)
Date: Sep 21, 2001 8:12:37 PM
Subject: Problem wbnitride 2001-09-21 20:12:36: quick dump not operational
Message-ID: <mailman.16.1356283965.5313.wbnitride-pcs@snf.stanford.edu>




From cmfaulkn at snf.stanford.edu  Fri Sep 21 08:14:23 2001
From: cmfaulkn at snf.stanford.edu (cmfaulkn at snf.stanford.edu)
Date: Sep 21, 2001 8:14:23 PM
Subject: Problem wbnitride 2001-09-21 20:14:22: Poor control on phosphoric bath
Message-ID: <mailman.17.1356283965.5313.wbnitride-pcs@snf.stanford.edu>

The phosphoric bath temperature keeps going high and into HOLD.  The DI drip is turning on, but apparently not nearly enough.



From booth at snf.stanford.edu  Tue Sep 25 06:54:28 2001
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Sep 25, 2001 6:54:28 AM
Subject: Problem wbnitride 2001-09-21 20:12:36: quick dump not operational
Message-ID: <mailman.18.1356283965.5313.wbnitride-pcs@snf.stanford.edu>

Fuses in 24vac supply transformer for QDR controller
were wrong size & blew.  Replaced fuses with correct
size, turned on pneu. air supply, & its working fine again.