From kenney at snf.stanford.edu  Wed Sep 25 05:30:33 2002
From: kenney at snf.stanford.edu (kenney at snf.stanford.edu)
Date: Sep 25, 2002 5:30:33 PM
Subject: Problem wbnitride 2002-09-25 17:30:32: Spin/Dry Heater
Message-ID: <mailman.42.1356283965.5313.wbnitride-pcs@snf.stanford.edu>

The heater only turns on for about 25 seconds during the
dry stage and for 10 seconds during the rinse stage.
The haeter at WBDIFF is on for 160 sec during rinse and
60 seconds during dry.



From jhaydon at snf.stanford.edu  Mon Sep 30 11:44:42 2002
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Sep 30, 2002 11:44:42 AM
Subject: Problem wbnitride 2002-09-25 17:30:32: Spin/Dry Heater
Message-ID: <mailman.43.1356283965.5313.wbnitride-pcs@snf.stanford.edu>

heater replaced ok to use