Problem wbnitride 2002-09-25 17:30:32: Spin/Dry Heater

kenney at snf.stanford.edu kenney at snf.stanford.edu
Wed Sep 25 05:30:33 PDT 2002


The heater only turns on for about 25 seconds during the
dry stage and for 10 seconds during the rinse stage.
The haeter at WBDIFF is on for 160 sec during rinse and
60 seconds during dry.




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