Shutdown wbnitride 2003-08-29 11:16:12: Report Clear for wbnitride

latta at snf.stanford.edu latta at snf.stanford.edu
Tue Sep 2 05:33:38 PDT 2003


De-conned the nitride bath.  The following procedure was used;
!0 min rinse
1 hr 5:1:1  DI:CHl:H2O2
10 min rinse
2 X fill and dump
1 hr 5:1:1
10 min rinse
4 X fill and dump
5 min rinse




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