Shutdown wbnitride 2003-08-29 11:16:12: Report Clear for wbnitride

[latta at snf.stanford.edu]

De-conned the nitride bath.  The following procedure was used;
!0 min rinse
1 hr 5:1:1  DI:CHl:H2O2
10 min rinse
2 X fill and dump
1 hr 5:1:1
10 min rinse
4 X fill and dump
5 min rinse