From tomada at snf.stanford.edu  Tue Jul  1 14:55:58 2008
From: tomada at snf.stanford.edu (tomada at snf.stanford.edu)
Date: Tue, 1 Jul 2008 14:55:58 -0700
Subject: Problem wbnitride SNF 2008-07-01 14:55:58: Leak from the vapor etcher recirculator (L)
Message-ID: <mailman.120.1356283966.5313.wbnitride-pcs@snf.stanford.edu>

Probably distilled water



From uli at snf.stanford.edu  Wed Jul  2 11:42:49 2008
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Wed, 2 Jul 2008 11:42:49 -0700
Subject: Problem wbnitride SNF 2008-07-02 11:42:49: HF vapor shutdown!
Message-ID: <mailman.121.1356283966.5313.wbnitride-pcs@snf.stanford.edu>

Water leak!



From latta at snf.stanford.edu  Thu Jul 10 08:32:54 2008
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Thu, 10 Jul 2008 08:32:54 -0700
Subject: Problem wbnitride SNF 2008-07-01 14:55:58: Leak from the vapor etcher recirculator (L)
Message-ID: <mailman.122.1356283966.5313.wbnitride-pcs@snf.stanford.edu>

cleaned up



From ahryciw at snf.stanford.edu  Thu Jul 17 15:43:19 2008
From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu)
Date: Thu, 17 Jul 2008 15:43:19 -0700
Subject: Problem wbnitride SNF 2008-07-17 15:43:18: Right spin-rinser not working.
Message-ID: <mailman.123.1356283966.5313.wbnitride-pcs@snf.stanford.edu>

Blown fuse?



From jhaydon at snf.stanford.edu  Wed Jul 23 09:45:49 2008
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 23 Jul 2008 09:45:49 -0700
Subject: Shutdown wbnitride SNF 2008-07-23 09:45:48: down for modification
Message-ID: <mailman.124.1356283966.5313.wbnitride-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Wed Jul 23 13:03:25 2008
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 23 Jul 2008 13:03:25 -0700
Subject: Shutdown wbnitride SNF 2008-07-23 09:45:48: down for modification
Message-ID: <mailman.125.1356283966.5313.wbnitride-pcs@snf.stanford.edu>

mod completed