Problem wbnitride SNF 2008-07-02 11:42:49: HF vapor shutdown!
uli at snf.stanford.edu
uli at snf.stanford.edu
Wed Jul 2 11:42:49 PDT 2008
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Problem wbnitride SNF 2008-07-01 14:55:58: Leak from the vapor etcher recirculator (L)
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Problem wbnitride SNF 2008-07-17 15:43:18: Right spin-rinser not working.
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Water leak!
Previous message:
Problem wbnitride SNF 2008-07-01 14:55:58: Leak from the vapor etcher recirculator (L)
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Problem wbnitride SNF 2008-07-17 15:43:18: Right spin-rinser not working.
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