Problem wbnitride SNF 2008-07-01 14:55:58: Leak from the vapor etcher recirculator (L)
latta at snf.stanford.edu
latta at snf.stanford.edu
Thu Jul 10 08:32:54 PDT 2008
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Problem wbnitride SNF 2008-07-01 14:55:58: Leak from the vapor etcher recirculator (L)
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Problem wbnitride SNF 2008-07-02 11:42:49: HF vapor shutdown!
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cleaned up
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Problem wbnitride SNF 2008-07-01 14:55:58: Leak from the vapor etcher recirculator (L)
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Problem wbnitride SNF 2008-07-02 11:42:49: HF vapor shutdown!
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