From gyama at snf.stanford.edu  Mon Oct 13 15:44:57 2008
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Mon, 13 Oct 2008 15:44:57 -0700
Subject: Comment wbnitride SNF 2008-10-13 15:44:56: HF vapor etcher down 
Message-ID: <mailman.138.1356283966.5313.wbnitride-pcs@snf.stanford.edu>

water bath leaking again, 6" wafer holder also
other leaking bath out for repair, due back in 2 weeks



From ahryciw at snf.stanford.edu  Mon Oct 13 17:42:10 2008
From: ahryciw at snf.stanford.edu (ahryciw at snf.stanford.edu)
Date: Mon, 13 Oct 2008 17:42:10 -0700
Subject: Comment wbnitride SNF 2008-10-13 17:42:10: Low liquid alarm until ~50 C
Message-ID: <mailman.139.1356283967.5313.wbnitride-pcs@snf.stanford.edu>

Intermittant Low Liquid alarm until pot reached ~50 C.



From nharjee at snf.stanford.edu  Wed Oct 29 20:13:24 2008
From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu)
Date: Wed, 29 Oct 2008 20:13:24 -0700
Subject: Comment wbnitride SNF 2008-10-29 20:13:21: SRD interlock
Message-ID: <mailman.140.1356283967.5313.wbnitride-pcs@snf.stanford.edu>

Is it possible to logically-OR the interlocks of wbnonmetal and wbnitride and feed the result to the shared SRD beside wbnitride so that it is functional when either bench is enabled? Thanks.



From gyama at snf.stanford.edu  Thu Oct 30 08:14:07 2008
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Thu, 30 Oct 2008 08:14:07 -0700
Subject: Comment wbnitride SNF 2008-10-30 08:14:06: replaced 45C bath, no leaks, OK to clear
Message-ID: <mailman.141.1356283967.5313.wbnitride-pcs@snf.stanford.edu>




From jhaydon at snf.stanford.edu  Thu Oct 30 11:55:39 2008
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Thu, 30 Oct 2008 11:55:39 -0700
Subject: Problem wbnitride SNF 2008-08-17 09:25:42: Liquid leak
Message-ID: <mailman.142.1356283967.5313.wbnitride-pcs@snf.stanford.edu>

bath has been replaced