From mtang at snf.stanford.edu  Fri Jan  2 13:44:09 2009
From: mtang at snf.stanford.edu (mtang at snf.stanford.edu)
Date: Fri, 2 Jan 2009 13:44:09 -0800
Subject: Comment wbnitride SNF 2009-01-02 13:44:09: HF Vapor etch
Message-ID: <mailman.148.1356283967.5313.wbnitride-pcs@snf.stanford.edu>

Poured acid and switched on circulating units as per Gary Yama.  The spacer wafer was broken, so I replaced it with a clean wafer with 1000 A of LTO.