Comment wbnitride SNF 2009-01-02 13:44:09: HF Vapor etch

mtang at snf.stanford.edu mtang at snf.stanford.edu
Fri Jan 2 13:44:09 PST 2009


Poured acid and switched on circulating units as per Gary Yama.  The spacer wafer was broken, so I replaced it with a clean wafer with 1000 A of LTO.




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