From wonukjo at snf.stanford.edu  Thu Dec  8 19:38:45 2011
From: wonukjo at snf.stanford.edu (wonukjo at snf.stanford.edu)
Date: Thu, 8 Dec 2011 19:38:45 -0800
Subject: Comment wbnitride SNF 2011-12-08 19:38:45: broken wafer
Message-ID: <mailman.195.1356283967.5313.wbnitride-pcs@snf.stanford.edu>

wafer broken while stripping nitride. 1/2 of the wafer was stil in the casette.



From uli at snf.stanford.edu  Tue Dec 13 10:38:38 2011
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Tue, 13 Dec 2011 10:38:38 -0800
Subject: Shutdown wbnitride SNF 2011-12-13 10:38:38: 
Message-ID: <mailman.196.1356283967.5313.wbnitride-pcs@snf.stanford.edu>