From ywidjaja at snf.stanford.edu Mon Jun 27 03:38:34 2011 From: ywidjaja at snf.stanford.edu (ywidjaja at snf.stanford.edu) Date: Mon, 27 Jun 2011 03:38:34 -0700 Subject: Problem wbnitride SNF 2011-06-27 03:38:33: No DI drip? Message-ID: DI drip flow is always at 0, resulting in overheating. From uli at snf.stanford.edu Mon Jun 27 11:54:24 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Mon, 27 Jun 2011 11:54:24 -0700 Subject: Problem wbnitride SNF 2011-06-27 03:38:33: No DI drip? Message-ID: Not in use, we are NOT running the cooling water, WOULD BE WASTE OF WATER, keep it 0. Before you start the heater, turn the cooling water to 7, once you stop heating, switch it back to 0. Short Sheet for wbnitride 1. Enable 'wbnitride' on Coral. 2. Use a cassette handle to careful swish the acid in the etch bath. 3. Turn coil water flow on to 7. 4. Press the PWR and then HOLD (on-off) buttons to start heating the bath. The Liq Low alarm should light should go off, but the L Temp light will turn on. Heating the bath to 155 ?C should take about 45 minutes or less. 5. Press ALARM SILEN to stop the audible alarm. 6. Monitor the heating of the bath by periodically looking at the controller for alarms. 7. Change the etch time if desired by toggling to the CS parameter. The up and down arrows will change the value. 8. Carefully lift the top of the bath and place an etch Teflon cassette (yellow button) with your wafers in it into the bath. Be careful, as the bath is tall. Leave the handle on the cassette. The bath is hot enough that the Teflon expands and will make it impossible to insert the handle once at temperature. 9. Very cautiously remove your cassette when the timer alarms. It will be 'loose' because the temperature of the bath. 10. Rinse and dry. 11. Press PWR to turn off the bath. 12. Turn coil water flow back to 0. 13. Disable 'wbnitride'.