From uli at snf.stanford.edu Tue May 3 17:26:04 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 3 May 2011 17:26:04 -0700 Subject: Problem wbnitride SNF 2011-01-03 18:09:37: don't use SRD Message-ID: It can be used for 3 and 4 inch wafers, wbnonmetal and wbnitride. The 3 inch insert is on top of the SRD. If the cassette is not full, the wafers should be evenly spaced throughout the boat. Please use only recipe #1. Let me know if you need a different recipe, for example for thinner wafers. Don't run recipe #1 wihtout a cassette. If the SRD is not in use, an auto cycle will run every hour at a low RPM without cassette. Uli From uli at snf.stanford.edu Tue May 3 17:29:22 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 3 May 2011 17:29:22 -0700 Subject: Comment wbnitride SNF 2011-05-03 17:29:22: New SRD for wbnitride and wbnonmetal. Message-ID: It can be used for 3 and 4 inch wafers, wbnonmetal and wbnitride. The 3 inch insert is on top of the SRD. If the cassette is not full, the wafers should be evenly spaced throughout the boat. Please use only recipe #1. Let me know if you need a different recipe, for example for thinner wafers. Don't run recipe #1 wihtout a cassette. If the SRD is not in use, an auto cycle will run every hour at a low RPM without cassette.