Problem wbnitride SNF 2011-01-03 18:09:37: don't use SRD

uli at snf.stanford.edu uli at snf.stanford.edu
Tue May 3 17:26:04 PDT 2011


It can be used for 3 and 4 inch wafers, wbnonmetal and wbnitride. 
The 3 inch insert is on top of the SRD. If the cassette is not full, the wafers should be evenly spaced throughout the boat.
Please use only recipe #1. Let me know if you need a different recipe, for example for thinner wafers. Don't run recipe #1 wihtout a cassette.
If the SRD is not in use, an auto cycle will run every hour at a low RPM without cassette.
Uli
 




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