Comment wbnitride SNF 2011-05-03 17:29:22: New SRD for wbnitride and wbnonmetal.

uli at snf.stanford.edu uli at snf.stanford.edu
Tue May 3 17:29:22 PDT 2011


It can be used for 3 and 4 inch wafers, wbnonmetal and wbnitride. 
The 3 inch insert is on top of the SRD. If the cassette is not full, the wafers should be evenly spaced throughout the boat.
Please use only recipe #1. Let me know if you need a different recipe, for example for thinner wafers. Don't run recipe #1 wihtout a cassette.
If the SRD is not in use, an auto cycle will run every hour at a low RPM without cassette.




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