From uli at snf.stanford.edu  Thu Feb 16 09:40:25 2012
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 16 Feb 2012 09:40:25 -0800
Subject: Shutdown wbnitride SNF 2011-12-13 10:38:38: 
Message-ID: <mailman.197.1356283967.5313.wbnitride-pcs@snf.stanford.edu>

Phosphoric bath has been decontaminated and bench can be used for Delrin/plastic Tweezers cleaning.
HF vapor prime not up yet.



From uli at snf.stanford.edu  Thu Feb 16 09:40:36 2012
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 16 Feb 2012 09:40:36 -0800
Subject: Comment wbnitride SNF 2011-12-08 19:38:45: broken wafer
Message-ID: <mailman.198.1356283967.5313.wbnitride-pcs@snf.stanford.edu>

Removed



From uli at snf.stanford.edu  Thu Feb 16 09:41:03 2012
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 16 Feb 2012 09:41:03 -0800
Subject: Problem wbnitride SNF 2012-02-16 09:41:03: HF vapor prime not up yet.
Message-ID: <mailman.199.1356283967.5313.wbnitride-pcs@snf.stanford.edu>




From gyama at snf.stanford.edu  Mon Feb 20 16:24:09 2012
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Mon, 20 Feb 2012 16:24:09 -0800
Subject: Comment wbnitride SNF 2012-02-20 16:24:08: 38% HF poured 2/20/2012  GY
Message-ID: <mailman.200.1356283967.5313.wbnitride-pcs@snf.stanford.edu>




From gyama at snf.stanford.edu  Wed Feb 29 10:27:24 2012
From: gyama at snf.stanford.edu (gyama at snf.stanford.edu)
Date: Wed, 29 Feb 2012 10:27:24 -0800
Subject: Comment wbnitride SNF 2012-02-29 10:27:24: VHF needs etch rate check
Message-ID: <mailman.201.1356283967.5313.wbnitride-pcs@snf.stanford.edu>