From amol at stanford.edu  Tue Nov  7 09:51:50 2000
From: amol at stanford.edu (Amol Ramesh Joshi)
Date: Tue, 7 Nov 2000 09:51:50 -0800 (PST)
Subject: wbnitride dump rinse
Message-ID: <Pine.GSO.4.21.0011070932200.9204-100000@epic22.Stanford.EDU>



	Hi Jim,

	wbnitride dump rinser has a note saying that it is probably gold
contaminated. The note is dated Nov. 1. There is only one dump rinser on
wbnitride. Where should I do the dump rinse after nitride etch? I will
hate to do it at wbnonmetal with H3PO4 dripping during the journey. If the
dump rinser is contaminated, what about H3PO4 pot and the spin dryer? I do
not see any problem reported on Coral. Does it mean that problem has been
taken care of? Users have not been informed about contamination/cleaning.
Such instances have become frequent recently.

	Thanks,

	- Amol



From amol at stanford.edu  Thu Nov 30 10:10:11 2000
From: amol at stanford.edu (Amol Ramesh Joshi)
Date: Thu, 30 Nov 2000 10:10:11 -0800 (PST)
Subject: DI water gun missing
Message-ID: <Pine.GSO.4.21.0011301006560.25738-100000@epic22.Stanford.EDU>



	Hi,

	I found that DI water gun is missing from wbnitride! Nitride wet
etch is not possible without it. I drained the H3PO4 pot but could not
rinse it.

	- Amol