From eperalta at stanford.edu  Mon Mar 14 20:56:40 2011
From: eperalta at stanford.edu (Edgar Peralta)
Date: Mon, 14 Mar 2011 20:56:40 -0700
Subject: measured nitride etch rate in phosphoric acid?
Message-ID: <AANLkTinq-a3kAkmX1X9bdv_Gf-os0e9_8yJScn9oWTTD@mail.gmail.com>

Hi all,

I would like to know if anyone's measured the etch rate of nitride in the
phosphoric acid etch of wbnitride.
The wiki lists 32A/min being the etch rate of nitride in phosphoric acid and
I just wanted to make sure this is what current users have experienced.

Thank you for your time,

Edgar
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