From uthumser at stanford.edu Tue May 3 17:30:16 2011 From: uthumser at stanford.edu (Uli Thumser) Date: Tue, 03 May 2011 17:30:16 -0700 Subject: New SRD for wbnitride and wbnonmetal Message-ID: <4DC09E18.9030409@stanford.edu> It can be used for 3 and 4 inch wafers, wbnonmetal and wbnitride. The 3 inch insert is on top of the SRD. If the cassette is not full, the wafers should be evenly spaced throughout the boat. Please use only recipe #1. Let me know if you need a different recipe, for example for thinner wafers. Don't run recipe #1 wihtout a cassette. If the SRD is not in use, an auto cycle will run every hour at a low RPM without cassette. -------------- next part -------------- A non-text attachment was scrubbed... Name: uthumser.vcf Type: text/x-vcard Size: 298 bytes Desc: not available URL: