New SRD for wbnitride and wbnonmetal

Uli Thumser uthumser at stanford.edu
Tue May 3 17:30:16 PDT 2011


It can be used for 3 and 4 inch wafers, wbnonmetal and wbnitride.
The 3 inch insert is on top of the SRD. If the cassette is not full, the 
wafers should be evenly spaced throughout the boat.
Please use only recipe #1. Let me know if you need a different recipe, 
for example for thinner wafers. Don't run recipe #1 wihtout a cassette.
If the SRD is not in use, an auto cycle will run every hour at a low RPM 
without cassette.

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