From wittbrod at snf.stanford.edu Tue Apr 3 03:28:50 2001 From: wittbrod at snf.stanford.edu (wittbrod at snf.stanford.edu) Date: Apr 3, 2001 3:28:50 PM Subject: Problem wbnonmetal 2001-04-03 15:28:48: 4/03/2001 3:30 pm 90%sulfuric/10% hydrogen per. bath- broken wafer piece in bath waiting for temp. to drop in order to drain Message-ID: From booth at snf.stanford.edu Mon Apr 16 07:51:56 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 16, 2001 7:51:56 AM Subject: Problem wbnonmetal 2001-04-03 15:28:48: 4/03/2001 3:30 pm 90%sulfuric/10% hydrogen per. bath- broken wafer piece in bath waiting for temp. to drop in order to drain Message-ID: cleared From seymour at snf.stanford.edu Mon Apr 30 11:07:37 2001 From: seymour at snf.stanford.edu (seymour at snf.stanford.edu) Date: Apr 30, 2001 11:07:37 AM Subject: Shutdown wbnonmetal 2001-04-30 11:07:36: sensor replacement and dump temp adjust Message-ID: From jhaydon at snf.stanford.edu Mon Apr 30 05:24:53 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Apr 30, 2001 5:24:53 PM Subject: Shutdown wbnonmetal 2001-04-30 11:07:36: sensor replacement and dump temp adjust Message-ID: Sensor replaced on left hand hot pot and controler replaced on right hand controler From jhaydon at snf.stanford.edu Mon Apr 30 05:30:05 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Apr 30, 2001 5:30:05 PM Subject: Problem wbnonmetal 2001-04-30 17:30:03: controler and possible contamination Message-ID: The left and right hand hot pots are contaminated and should not be used until they are decontaminated. The left hand hot pot will be left with decontamination chemicals over night. The right hand hot pot should not be used at all.