Problem wbnonmetal 2001-04-30 17:30:03: controler and possible contamination

jhaydon at snf.stanford.edu jhaydon at snf.stanford.edu
Mon Apr 30 05:30:05 PDT 2001

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Next message: Shutdown wbnonmetal 2001-04-30 11:07:36: sensor replacement and dump temp adjust
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The left and right hand hot pots are contaminated and should not be used until they are decontaminated. The left hand hot pot will be left with decontamination chemicals over night. The right hand hot pot should not be used at all.

Previous message: Problem wbnonmetal 2001-04-03 15:28:48: 4/03/2001 3:30 pm 90%sulfuric/10% hydrogen per. bath- broken wafer piece in bath waiting for temp. to drop in order to drain
Next message: Shutdown wbnonmetal 2001-04-30 11:07:36: sensor replacement and dump temp adjust
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

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