From franklin at snf.stanford.edu Thu Jan 18 03:47:19 2001 From: franklin at snf.stanford.edu (franklin at snf.stanford.edu) Date: Jan 18, 2001 3:47:19 PM Subject: Problem wbnonmetal 2001-01-18 15:47:19: left dump riser not working Message-ID: The left dump rinser is not cycling properly, when press start it simply stays full and doesn't drain. Also the nanostrip bath on the right did not strip my wafers, even at 55deg C. I suspect a change is needed, but since this is a new stripper I didn't do it plus the neutralization system probably wouldn't like it quite yet. I also have a question about the temperature setting on the nanostrip. The working temp is set to 55C but the high limit is also set to 55C. So when you heat up hyour wafers the systems starts to alarm once it reaches 55C. I tried adjusting the alarm temp myself, but was unable to. Thanks nate From cbaxter at snf.stanford.edu Thu Jan 18 04:31:44 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 18, 2001 4:31:44 PM Subject: Problem wbnonmetal 2001-01-18 15:47:19: left dump riser not working Message-ID: cycle dump rinser and its woring fine From beckwith at snf.stanford.edu Wed Jan 24 12:39:06 2001 From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu) Date: Jan 24, 2001 12:39:06 PM Subject: Problem wbnonmetal 2001-01-24 12:39:04: control panel lights on the left dump rinser have slide down so you cannot see them. People are leaving the dump rinser with the dump door open because the light appears to be off. Well, all of the li Message-ID: From hopcroft at snf.stanford.edu Wed Jan 24 04:22:28 2001 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Jan 24, 2001 4:22:28 PM Subject: Problem wbnonmetal 2001-01-24 16:22:26: BOE 6:1 contaminated Message-ID: From cbaxter at snf.stanford.edu Wed Jan 24 06:02:41 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 24, 2001 6:02:41 PM Subject: Problem wbnonmetal 2001-01-24 12:39:04: control panel lights on the left dump rinser have slide down so you cannot see them. People are leaving the dump rinser with the dump door open because the light appears to be off. Well, all of the li Message-ID: secure controller, now led is visible. From jgarate at snf.stanford.edu Thu Jan 25 08:02:36 2001 From: jgarate at snf.stanford.edu (jgarate at snf.stanford.edu) Date: Jan 25, 2001 8:02:36 AM Subject: Problem wbnonmetal 2001-01-24 16:22:26: BOE 6:1 has been decontaminated, and have pour fresh chemical. Okay to use! Message-ID: From lindaw at snf.stanford.edu Tue Jan 30 01:03:59 2001 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Jan 30, 2001 1:03:59 PM Subject: Problem wbnonmetal 2001-01-30 13:03:57: Left DR running continuously Message-ID: Left in Dump Door mode to conserve DI H2O From hopcroft at snf.stanford.edu Tue Jan 30 02:19:57 2001 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Jan 30, 2001 2:19:57 PM Subject: Problem wbnonmetal 2001-01-30 14:19:54: wafer pieces in L sulfuric bath Message-ID: From cbaxter at snf.stanford.edu Tue Jan 30 05:10:16 2001 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 30, 2001 5:10:16 PM Subject: Problem wbnonmetal 2001-01-30 13:03:57: Left DR running continuously Message-ID: filled solenoid was stuck. turn off power and turn back.. From latta at snf.stanford.edu Wed Jan 31 10:06:34 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 31, 2001 10:06:34 AM Subject: Problem wbnonmetal 2001-01-31 10:06:33: Lf side dumpriner in constant 'flush' mode. Message-ID: I put it in dump water mode to conserve DI. From latta at snf.stanford.edu Wed Jan 31 10:08:57 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 31, 2001 10:08:57 AM Subject: Problem wbnonmetal 2001-01-31 10:06:33: Lf side dumpriner in constant 'flush' mode. Message-ID: Please disreard. Dump rinser has healed itself....