From hopcroft at snf.stanford.edu  Thu Mar  1 08:51:02 2001
From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu)
Date: Mar 1, 2001 8:51:02 PM
Subject: Problem wbnonmetal 2001-03-01 20:50:59: Si pieces in l sulfuric bath
Message-ID: <mailman.73.1357939059.26053.wbnonmetal-pcs@snf.stanford.edu>




From latta at snf.stanford.edu  Mon Mar  5 04:37:59 2001
From: latta at snf.stanford.edu (latta at snf.stanford.edu)
Date: Mar 5, 2001 4:37:59 PM
Subject: Problem wbnonmetal 2001-03-01 20:50:59: Si pieces in l sulfuric bath
Message-ID: <mailman.74.1357939059.26053.wbnonmetal-pcs@snf.stanford.edu>

Bath cooled drained cleaned- ok!



From greene at snf.stanford.edu  Thu Mar 15 07:28:38 2001
From: greene at snf.stanford.edu (greene at snf.stanford.edu)
Date: Mar 15, 2001 7:28:38 AM
Subject: Problem wbnonmetal 2001-03-15 07:28:36: rust visible on spin dryer rotor
Message-ID: <mailman.75.1357939059.26053.wbnonmetal-pcs@snf.stanford.edu>

There is rust visible on the wbnonmetal spin dryer rotor.  The rust comes in direct contact with wafer cassettes.  This is a serious contamination concern.



From seymour at snf.stanford.edu  Thu Mar 15 08:26:13 2001
From: seymour at snf.stanford.edu (seymour at snf.stanford.edu)
Date: Mar 15, 2001 8:26:13 AM
Subject: Problem wbnonmetal 2001-03-15 07:28:36: rust visible on spin dryer rotor
Message-ID: <mailman.76.1357939059.26053.wbnonmetal-pcs@snf.stanford.edu>

I looked at the rotor and there was a redish deposit which cameoff very easily with no discoloration under it. stainless was shiny. I cleaned off the material and ran a clean cycle with an empty cassette.