From ericp at snf.stanford.edu Wed Sep 5 10:22:49 2001 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sep 5, 2001 10:22:49 PM Subject: Problem wbnonmetal 2001-09-05 22:22:45: Junk in 50:1 ? Message-ID: I found the 50:1 bath with an oily looking film on the surface. I drained the bath, refilled w/ water, overflowed with water, and found no more film. I drained the bath and left it drained. From booth at snf.stanford.edu Mon Sep 10 07:23:12 2001 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 10, 2001 7:23:12 AM Subject: Problem wbnonmetal 2001-09-05 22:22:45: Junk in 50:1 ? Message-ID: 50:1 bath looks clean today 09/10/01. From jhaydon at snf.stanford.edu Thu Sep 13 10:28:42 2001 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Sep 13, 2001 10:28:42 AM Subject: Problem wbnonmetal 2001-07-31 00:33:03: 20:1 drain not closing Message-ID: drain appears to be working From latta at snf.stanford.edu Tue Sep 25 02:17:29 2001 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Sep 25, 2001 2:17:29 PM Subject: Problem wbnonmetal 2001-09-25 14:17:28: spin dryer ticks, like it is out of true.... Message-ID: Dumprinser (lf hand side) also ticks. From rgrow at snf.stanford.edu Wed Sep 26 01:54:30 2001 From: rgrow at snf.stanford.edu (rgrow at snf.stanford.edu) Date: Sep 26, 2001 1:54:30 PM Subject: Problem wbnonmetal 2001-09-26 13:54:28: spin dryer doesn't dry completely Message-ID: After 180/240, there are still drops of water in the middle of the wafers. I had to go an extra 120 to get them dry. Sharleen pointed out that the N2 might not be working right.