Problem wbnonmetal 2001-09-26 13:54:28: spin dryer doesn't dry completely

rgrow at snf.stanford.edu rgrow at snf.stanford.edu
Wed Sep 26 01:54:30 PDT 2001


After 180/240, there are still drops of water in the middle of the wafers. I had to go an extra 120 to get them dry. Sharleen pointed out that the N2 might not be working right.




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