Problem wbnonmetal 2002-07-29 11:31:18: Very Loose Splashgard over Hot Pots

sams at snf.stanford.edu sams at snf.stanford.edu
Mon Jul 29 11:31:19 PDT 2002


The leftmost splashgard (over the hotpots) is very loose. I knocked it out when I was transfering wafers to the dumprinser. Some sulfuric splashed out of the left hotpot. I have cleaned off the bench and replaced the solution in the left hotpot.
Call me if you have questions 617 543-5875
--Sam




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