From ycfu at snf.stanford.edu Tue May 13 03:43:48 2003 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: May 13, 2003 3:43:48 PM Subject: Problem wbnonmetal 2003-05-13 15:43:46: Report Problem for wbnonmetal Message-ID: wafer pieces in one of the Piranha tanks From jhaydon at snf.stanford.edu Wed May 14 07:39:46 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 14, 2003 7:39:46 AM Subject: Problem wbnonmetal 2003-05-13 15:43:46: Report Clear for wbnonmetal Message-ID: saw no pieces someone must have cleaned them up should be ok to use From mislam at snf.stanford.edu Wed May 14 08:25:02 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: May 14, 2003 8:25:02 AM Subject: Problem wbnonmetal 2003-05-14 08:24:59: Wafers left in dump rinser Message-ID: Someone left two cassette with wafers in the dump rinser. From jhaydon at snf.stanford.edu Thu May 15 07:33:38 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 15, 2003 7:33:38 AM Subject: Problem wbnonmetal 2003-05-14 08:24:59: Report Clear for wbnonmetal Message-ID: found no wafers ok to use From lindaw at snf.stanford.edu Sat May 17 12:49:36 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: May 17, 2003 12:49:36 PM Subject: Comment wbnonmetal 2003-05-17 12:49:35: 1 box missing a lid, can't find it anywhere Message-ID: From ycfu at snf.stanford.edu Sun May 18 01:17:42 2003 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: May 18, 2003 1:17:42 PM Subject: Problem wbnonmetal 2003-05-18 13:17:40: Report Problem for wbnonmetal Message-ID: The left hand side dump rinser does not have water inside (the dump door light is off ) From cbellew at snf.stanford.edu Sun May 18 05:15:44 2003 From: cbellew at snf.stanford.edu (cbellew at snf.stanford.edu) Date: May 18, 2003 5:15:44 PM Subject: Problem wbnonmetal 2003-05-18 17:15:43: wbnonmetal baths contaminated by photolithography cassette Message-ID: Someone put a photolithography cassette with one brown dot into an etch box. I didn't realize this until after I had put it through the right side 9:1 Sulfuric Acid/Hydrogen Peroxide bath and the left side dump rinser. I drained and rinsed the piranha tank and left notes over the controls for both. The cassette, the etch box that it was in and the handle I used are on the table next to the implanter. From jhaydon at snf.stanford.edu Mon May 19 07:21:29 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 19, 2003 7:21:29 AM Subject: Problem wbnonmetal 2003-05-18 13:17:40: Report Clear for wbnonmetal Message-ID: it is working now From latta at snf.stanford.edu Mon May 19 03:01:14 2003 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: May 19, 2003 3:01:14 PM Subject: Problem wbnonmetal 2003-05-18 17:15:43: Report Clear for wbnonmetal Message-ID: Full decontamination of wetbench performed; hotpots, RT tanks, their lids, cassette handles, dumprinsers and deck surface. All chems will need to be replaced by next user(s). From mcconnel at snf.stanford.edu Wed May 21 07:45:44 2003 From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu) Date: May 21, 2003 7:45:44 AM Subject: Problem wbnonmetal 2003-05-21 07:45:41: Report Problem for wbnonmetal Message-ID: The right hot pot display indicates "low liquid level" although the pot is full (and the wetbench is enabled). Thus, the heater won't turn on. From jhaydon at snf.stanford.edu Wed May 21 08:02:45 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 21, 2003 8:02:45 AM Subject: Problem wbnonmetal 2003-05-21 07:45:41: Report Clear for wbnonmetal Message-ID: appears to be working may have a faulty switch I will keep an eye on it From iwjung at snf.stanford.edu Thu May 22 02:01:33 2003 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: May 22, 2003 2:01:33 PM Subject: Problem wbnonmetal 2003-05-22 14:01:32: Report Problem for wbnonmetal Message-ID: one rinser not working. From uli at snf.stanford.edu Thu May 22 02:17:07 2003 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: May 22, 2003 2:17:07 PM Subject: Problem wbnonmetal 2003-05-22 14:01:32: Report Clear for wbnonmetal Message-ID: it is working again From ericp at snf.stanford.edu Wed May 28 11:56:01 2003 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: May 28, 2003 11:56:01 PM Subject: Problem wbnonmetal 2003-05-28 23:55:59: RHP has intermittent Liq Lev fault Message-ID: Right hot pot intermittently indicates "low liq level" when the pot is full. From jhaydon at snf.stanford.edu Thu May 29 07:57:17 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 29, 2003 7:57:17 AM Subject: Problem wbnonmetal 2003-05-28 23:55:59: Report Clear for wbnonmetal Message-ID: replaced level switch From yyao at snf.stanford.edu Sat May 31 08:43:04 2003 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: May 31, 2003 8:43:04 AM Subject: Problem wbnonmetal 2003-05-31 08:43:03: Report Problem for wbnonmetal Message-ID: Left dump/rinse is out of order. Water can't come through.