From lindaw at snf.stanford.edu Wed Feb 4 08:32:10 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Wed, 4 Feb 2004 08:32:10 -0800 Subject: Problem wbnonmetal 2004-02-04 08:32:10: Left dump rinser won't dump Message-ID: From parco at snf.stanford.edu Fri Feb 6 09:03:20 2004 From: parco at snf.stanford.edu (parco at snf.stanford.edu) Date: Fri, 6 Feb 2004 09:03:20 -0800 Subject: Comment wbnonmetal 2004-02-06 09:03:20: Dried BOE (HF) Message-ID: someone is not cleaning after themselves. left large amount of dried BOE (HF) along the way towards the dump rinser. People be careful at night. found this morning 0830, 2-6-2004. tp From ericp at snf.stanford.edu Thu Feb 12 00:55:10 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Thu, 12 Feb 2004 00:55:10 -0800 Subject: Comment wbnonmetal 2004-02-12 00:55:09: L Dump rinser update Message-ID: Hey Jim, the left dump rinser appears to "work", but doesn't fill in standby mode. It WILL fill if you push start. From rfasch at snf.stanford.edu Fri Feb 13 07:49:08 2004 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Fri, 13 Feb 2004 07:49:08 -0800 Subject: Comment wbnonmetal 2004-02-13 07:49:07: a lot of droplets on the bench Message-ID: please clean the bench after using. From gladys at snf.stanford.edu Fri Feb 13 08:23:15 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Fri, 13 Feb 2004 08:23:15 -0800 Subject: Problem wbnonmetal 2004-02-13 08:23:14: mess on the wetbench Message-ID: Whoever had used it late last night or early this morning did not clean up. Please clean up, rinse off and dry the wetbench after use. This is so unsafe, not just for you but for all of us. From lindaw at snf.stanford.edu Sat Feb 14 09:58:33 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 14 Feb 2004 09:58:33 -0800 Subject: Problem wbnonmetal 2004-02-14 09:58:33: right pirahnna bath drained itself sat. morning Message-ID: I found both hot pots half full this morning, so I drained and poured new chemicals, turned on the heaters and put my wafers into the right hot pot. two minutes later the right hot pot was only half full. I checked that the drain was not on, it wasn't since the heater would not have come on if it was. I turned the heater on the right pot off and left a note on the bench. Liquid level remains at about half full. From lindaw at snf.stanford.edu Sat Feb 14 10:09:23 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 14 Feb 2004 10:09:23 -0800 Subject: Problem wbnonmetal 2004-02-14 10:09:23: left dump rinser door not activating to dump Message-ID: The left dump rinser door is not opening, and the bottom water jets are not activating during regular dump rinse, and when using the dump door feature. From lindaw at snf.stanford.edu Sat Feb 14 14:32:47 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 14 Feb 2004 14:32:47 -0800 Subject: Comment wbnonmetal 2004-02-14 14:32:46: chattering noise coming from behind inst. panel Message-ID: there is a strange "chattering" noise coming from behind the instrument panel for the hot pots. From lindaw at snf.stanford.edu Sat Feb 14 15:03:50 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 14 Feb 2004 15:03:50 -0800 Subject: Problem wbnonmetal 2004-02-14 15:03:50: N2 gun leaking at hose connection Message-ID: the hose is cracked right at the connection to the gun and is leaking when hose is stressed. From ericp at snf.stanford.edu Sat Feb 14 16:33:17 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 14 Feb 2004 16:33:17 -0800 Subject: Comment wbnonmetal 2004-02-14 16:33:17: N2 gun problem fixed Message-ID: The above problem is fixed with the N2 gun. You can clear it. From ericp at snf.stanford.edu Sat Feb 14 23:07:50 2004 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Sat, 14 Feb 2004 23:07:50 -0800 Subject: Comment wbnonmetal 2004-02-14 23:07:49: One more down.... Message-ID: The L dump rinser is again functioning. It appears to have had its program corrupted. The RH sulfuric pot is draining through the aspirator. It appears that the asp. gets stuck partially "ON" so it slowly drains. The problem is intermittent- sometimes it'll hold water, sometimes it won't. Once it is closed, it seems to be ok, but if you push "drain" for just a few seconds, it sometimes gets stuck and continues to slowly drain. -Eric From lindaw at snf.stanford.edu Sun Feb 15 15:09:34 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sun, 15 Feb 2004 15:09:34 -0800 Subject: Problem wbnonmetal 2004-02-15 15:09:33: Left SRD spit water out of door, didn't dry wafers Message-ID: The left SRD spit water out the door, didn't dry wafers, found a piece of broken wafer in bottom, but my wafers didn't break. Someone else left broken piece in SRD. I left a note on the SRD. (this wet bench is having a really bad weekend) : ( From jhaydon at snf.stanford.edu Tue Feb 17 07:42:09 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 07:42:09 -0800 Subject: Comment wbnonmetal 2004-02-14 16:33:17: N2 gun problem fixed Message-ID: From gladys at snf.stanford.edu Tue Feb 17 08:44:41 2004 From: gladys at snf.stanford.edu (gladys at snf.stanford.edu) Date: Tue, 17 Feb 2004 08:44:41 -0800 Subject: Shutdown wbnonmetal 2004-02-17 08:44:40: Right H2SO4 pot has a leaky drain valve Message-ID: Shutdown for maintenance work. From jhaydon at snf.stanford.edu Tue Feb 17 09:40:12 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:40:12 -0800 Subject: Shutdown wbnonmetal 2004-02-17 08:44:40: Right H2SO4 pot has a leaky drain valve Message-ID: leak fixed bad valve ok to use From jhaydon at snf.stanford.edu Tue Feb 17 09:41:49 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:41:49 -0800 Subject: Problem wbnonmetal 2004-02-15 15:09:33: Left SRD spit water out of door, didn't dry wafers Message-ID: SRD fixed seal was twisted From jhaydon at snf.stanford.edu Tue Feb 17 09:42:07 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:42:07 -0800 Subject: Problem wbnonmetal 2004-02-14 15:03:50: N2 gun leaking at hose connection Message-ID: n2 gun fixed From jhaydon at snf.stanford.edu Tue Feb 17 09:42:15 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:42:15 -0800 Subject: Comment wbnonmetal 2004-02-14 23:07:49: One more down.... Message-ID: From jhaydon at snf.stanford.edu Tue Feb 17 09:42:53 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:42:53 -0800 Subject: Problem wbnonmetal 2004-02-14 10:09:23: left dump rinser door not activating to dump Message-ID: tried left dump rinser several times did not have a problem From jhaydon at snf.stanford.edu Tue Feb 17 09:43:17 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:43:17 -0800 Subject: Problem wbnonmetal 2004-02-14 09:58:33: right pirahnna bath drained itself sat. morning Message-ID: fixed leak in valve From jhaydon at snf.stanford.edu Tue Feb 17 09:43:49 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:43:49 -0800 Subject: Problem wbnonmetal 2004-02-13 08:23:14: mess on the wetbench Message-ID: mess seams to cleaned up From jhaydon at snf.stanford.edu Tue Feb 17 09:44:19 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:44:19 -0800 Subject: Problem wbnonmetal 2004-02-04 08:32:10: Left dump rinser won't dump Message-ID: tried dump rinser several time did not have a problem From jhaydon at snf.stanford.edu Tue Feb 17 09:44:56 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 17 Feb 2004 09:44:56 -0800 Subject: Problem wbnonmetal 2004-01-26 09:33:39: left dump rinser water level is very low Message-ID: dump rinser is working now could not find a problem From xzhuan1 at snf.stanford.edu Fri Feb 20 15:18:11 2004 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Fri, 20 Feb 2004 15:18:11 -0800 Subject: Problem wbnonmetal 2004-02-20 15:18:11: left dump rinster Message-ID: doesn't rinse properly From lindaw at snf.stanford.edu Sat Feb 21 08:42:41 2004 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 21 Feb 2004 08:42:41 -0800 Subject: Problem wbnonmetal 2004-02-21 08:42:40: left dump rinser does not dump or refill Message-ID: during normal rinse cycle, the overhead spray comes on, but the rinser does not dump, and the lower water jets do not come on. When the dump door button is pushed, the rinser drains very slowly, and will not refill with the lower water jets when the dump door botton is turned off. Same problem as last weekend. Is someone messing around with the dump rinser program? From chcheng at snf.stanford.edu Sat Feb 21 17:50:05 2004 From: chcheng at snf.stanford.edu (chcheng at snf.stanford.edu) Date: Sat, 21 Feb 2004 17:50:05 -0800 Subject: Problem wbnonmetal 2004-02-21 17:50:04: The Drier Door Leaks Some Water Message-ID: From jhaydon at snf.stanford.edu Mon Feb 23 09:50:20 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:50:20 -0800 Subject: Problem wbnonmetal 2004-02-21 17:50:04: The Drier Door Leaks Some Water Message-ID: seal got twisted works ok now From jhaydon at snf.stanford.edu Mon Feb 23 09:50:40 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:50:40 -0800 Subject: Problem wbnonmetal 2004-02-21 08:42:40: left dump rinser does not dump or refill Message-ID: wire connection came loose From jhaydon at snf.stanford.edu Mon Feb 23 09:51:08 2004 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 23 Feb 2004 09:51:08 -0800 Subject: Problem wbnonmetal 2004-02-20 15:18:11: left dump rinster Message-ID: bad eletical connection works ok now