Problem wbnonmetal SNF 2005-11-07 12:20:38: poor surface energy properties opf wafers processed on this bench.

jwc at snf.stanford.edu jwc at snf.stanford.edu
Mon Nov 7 12:20:40 PST 2005


Greetings:
I am processing on this bench this morning and my initial cleans using the WBNONMETAL left hand 9:1 pihrana clean did not exhibit suitable surface energy on the wafer surfaces after the dump rinse.  This baths chemicals may have become contaminated.  repeating the clean again...
JWC 




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