From shimm at snf.stanford.edu Tue Feb 7 18:19:03 2006 From: shimm at snf.stanford.edu (shimm at snf.stanford.edu) Date: Tue, 7 Feb 2006 18:19:03 -0800 Subject: Problem wbnonmetal SNF 2006-02-07 18:19:02: broken wafer in the spin dryer Message-ID: 4" wafer was broken inside the spin dryer. Big pieces are removed but there sre still lots of small particles. If you need to dry your wafers, you'd better use the wbnitride dryer temporarily. Sorry for inconvenience. From latta at snf.stanford.edu Fri Feb 10 10:44:18 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Feb 2006 10:44:18 -0800 Subject: Problem wbnonmetal SNF 2006-02-07 18:19:02: broken wafer in the spin dryer Message-ID: Cleaned and rinsed. From latta at snf.stanford.edu Fri Feb 10 10:44:34 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Feb 2006 10:44:34 -0800 Subject: Problem wbnonmetal SNF 2006-01-25 10:12:36: broken wafer in left hot pot, low level sensor bad Message-ID: cleaned From latta at snf.stanford.edu Fri Feb 10 10:45:02 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Feb 2006 10:45:02 -0800 Subject: Problem wbnonmetal SNF 2006-01-24 16:39:00: left hotpot - Low LIQ Level error Message-ID: fixed From latta at snf.stanford.edu Fri Feb 10 10:45:26 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 10 Feb 2006 10:45:26 -0800 Subject: Comment wbnonmetal SNF 2006-01-05 08:46:51: Available for use. Lamp changeout not needed Message-ID: noted From iwjung at snf.stanford.edu Fri Feb 10 20:48:17 2006 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Fri, 10 Feb 2006 20:48:17 -0800 Subject: Problem wbnonmetal SNF 2006-02-10 20:48:16: heater error Message-ID: heater will not turn on even when enabled. From hopcroft at snf.stanford.edu Wed Feb 15 11:59:40 2006 From: hopcroft at snf.stanford.edu (hopcroft at snf.stanford.edu) Date: Wed, 15 Feb 2006 11:59:40 -0800 Subject: Problem wbnonmetal SNF 2006-02-15 11:59:39: L dump rinse Message-ID: The left dump rinser is behaving oddly- it fills slowly, and not always completely. Cycle runs very slowly. From maurice at snf.stanford.edu Thu Feb 16 11:16:56 2006 From: maurice at snf.stanford.edu (maurice at snf.stanford.edu) Date: Thu, 16 Feb 2006 11:16:56 -0800 Subject: Shutdown wbnonmetal SNF 2006-02-16 11:16:55: liquid under sink Message-ID: From jhaydon at snf.stanford.edu Thu Feb 16 13:13:10 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 16 Feb 2006 13:13:10 -0800 Subject: Shutdown wbnonmetal SNF 2006-02-16 11:16:55: liquid under sink Message-ID: leak fixed bad o-ring From jhaydon at snf.stanford.edu Thu Feb 16 13:13:29 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 16 Feb 2006 13:13:29 -0800 Subject: Problem wbnonmetal SNF 2006-02-15 11:59:39: L dump rinse Message-ID: repalced switch From jhaydon at snf.stanford.edu Thu Feb 16 13:14:40 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 16 Feb 2006 13:14:40 -0800 Subject: Problem wbnonmetal SNF 2006-02-10 20:48:16: heater error Message-ID: working now From sanjah at snf.stanford.edu Thu Feb 23 22:00:44 2006 From: sanjah at snf.stanford.edu (sanjah at snf.stanford.edu) Date: Thu, 23 Feb 2006 22:00:44 -0800 Subject: Problem wbnonmetal SNF 2006-02-23 22:00:44: BOE etch Message-ID: Somebody left a lot of HF crystals on the bench, and there is a wafer left in the BOE etch.