Problem wbnonmetal SNF 2006-02-07 18:19:02: broken wafer in the spin dryer

shimm at shimm at
Tue Feb 7 18:19:03 PST 2006

4" wafer was broken inside the spin dryer. Big pieces are removed but there sre still lots of small particles. If you need to dry your wafers, you'd better use the wbnitride dryer temporarily. Sorry for inconvenience.

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