From caudillo at snf.stanford.edu Mon Mar 13 17:57:20 2006 From: caudillo at snf.stanford.edu (caudillo at snf.stanford.edu) Date: Mon, 13 Mar 2006 17:57:20 -0800 Subject: Problem wbnonmetal SNF 2006-03-13 17:57:19: SRD Message-ID: The final dry cycle of 240 seconds does not dry a boat load of wafers. Beads of water on wafers and boat. Check heater please and let us know please. From jhaydon at snf.stanford.edu Tue Mar 14 14:34:01 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 14 Mar 2006 14:34:01 -0800 Subject: Problem wbnonmetal SNF 2006-03-13 17:57:19: SRD Message-ID: replaced heater From chaseonline at chaseonline.chase.com Fri Mar 17 17:19:32 2006 From: chaseonline at chaseonline.chase.com (Chase Card Services Online Services Team) Date: Fri, 17 Mar 2006 19:19:32 -0600 Subject: Unlock and renew your account Message-ID: <200603180119.k2I1JW61031812@genie.c-cubedmedia.com> An HTML attachment was scrubbed... URL: From jhaydon at snf.stanford.edu Mon Mar 20 14:15:34 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 20 Mar 2006 14:15:34 -0800 Subject: Problem wbnonmetal SNF 2006-02-23 22:00:44: BOE etch Message-ID: looks cleaned up to me From rohits at snf.stanford.edu Mon Mar 20 16:46:49 2006 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Mon, 20 Mar 2006 16:46:49 -0800 Subject: Problem wbnonmetal SNF 2006-03-20 16:46:49: spin/rinse dryer - no spinning during dry Message-ID: This is regarding the lower spin/rinse dryer (4" wafers). During the 240s portion of the spin dry cycle, the wafers do not spin. The spinning works during the rinse cycle. From jhaydon at snf.stanford.edu Tue Mar 21 15:35:49 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 21 Mar 2006 15:35:49 -0800 Subject: Problem wbnonmetal SNF 2006-03-20 16:46:49: spin/rinse dryer - no spinning during dry Message-ID: replaced controller From kcrabb at snf.stanford.edu Wed Mar 22 18:30:10 2006 From: kcrabb at snf.stanford.edu (kcrabb at snf.stanford.edu) Date: Wed, 22 Mar 2006 18:30:10 -0800 Subject: Problem wbnonmetal SNF 2006-03-22 18:30:09: Spin Rinser/Dryer Malfunctioning Message-ID: The bottom spin dryer was not proceeding to the spin dry cycle, only rinsing for a very long time. Eventually took wafers out and switched to spin dryer on other side of wbnitride. From jhaydon at snf.stanford.edu Thu Mar 23 09:37:44 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 23 Mar 2006 09:37:44 -0800 Subject: Problem wbnonmetal SNF 2006-03-22 18:30:09: Spin Rinser/Dryer Malfunctioning Message-ID: changed controller should be ok