Problem wbnonmetal SNF 2006-03-20 16:46:49: spin/rinse dryer - no spinning during dry

rohits at snf.stanford.edu rohits at snf.stanford.edu
Mon Mar 20 16:46:49 PST 2006


This is regarding the lower spin/rinse dryer (4" wafers). During the 240s portion of the spin dry cycle, the wafers do not spin. The spinning works during the rinse cycle.




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