Problem wbnonmetal SNF 2006-03-22 18:30:09: Spin Rinser/Dryer Malfunctioning

kcrabb at snf.stanford.edu kcrabb at snf.stanford.edu
Wed Mar 22 18:30:10 PST 2006


The bottom spin dryer was not proceeding to the spin dry cycle, only rinsing for a very long time.  Eventually took wafers out and switched to spin dryer on other side of wbnitride.




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