From lindaw at snf.stanford.edu Tue May 2 13:32:14 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 2 May 2006 13:32:14 -0700 Subject: Comment wbnonmetal SNF 2006-05-02 13:32:13: found a litho cassette in an "etch" box Message-ID: I put the box and cassette over by the implanter with all the other contaminated cassettes. There are now only two 4" wafer cassettes at wbnonmetal. From latta at snf.stanford.edu Fri May 5 16:22:56 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:22:56 -0700 Subject: Problem wbnonmetal SNF 2006-04-05 05:47:50: Piece in left sulfuric peroxide hotpot Message-ID: noted From latta at snf.stanford.edu Fri May 5 16:23:32 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:23:32 -0700 Subject: Comment wbnonmetal SNF 2006-04-27 05:13:37: spin rinse/dryer might be contaminated Message-ID: noted From latta at snf.stanford.edu Fri May 5 16:24:25 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 5 May 2006 16:24:25 -0700 Subject: Comment wbnonmetal SNF 2006-05-02 13:32:13: found a litho cassette in an "etch" box Message-ID: more cassettes showed up. Will clean the dirty one.... From jhaydon at snf.stanford.edu Tue May 23 16:30:41 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 23 May 2006 16:30:41 -0700 Subject: Comment wbnonmetal SNF 2006-05-23 16:30:40: installation of new dump rinsers Message-ID: From uli at snf.stanford.edu Tue May 23 16:36:52 2006 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 23 May 2006 16:36:52 -0700 Subject: Comment wbnonmetal SNF 2006-05-23 16:30:40: installation of new dump rinsers Message-ID: From jhaydon at snf.stanford.edu Wed May 24 06:26:49 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Wed, 24 May 2006 06:26:49 -0700 Subject: Shutdown wbnonmetal SNF 2006-05-24 06:26:49: new dump rinser installation Message-ID: From latta at snf.stanford.edu Thu May 25 17:14:06 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 May 2006 17:14:06 -0700 Subject: Problem wbnonmetal SNF 2006-04-13 01:39:05: right rinse tank not working Message-ID: he he- working now... Replaced. From latta at snf.stanford.edu Thu May 25 17:14:52 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 May 2006 17:14:52 -0700 Subject: Shutdown wbnonmetal SNF 2006-05-24 06:26:49: new dump rinser installation Message-ID: instalation and upgrade complete. De-con in progress. From latta at snf.stanford.edu Thu May 25 17:15:23 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 May 2006 17:15:23 -0700 Subject: Shutdown wbnonmetal SNF 2006-05-25 17:15:23: De-contamination in progress Message-ID: From latta at snf.stanford.edu Thu May 25 17:16:03 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 May 2006 17:16:03 -0700 Subject: Comment wbnonmetal SNF 2006-05-25 17:16:02: Far left dump rinser is not working.... Message-ID: .. correctly. Please avoid. From latta at snf.stanford.edu Thu May 25 18:07:35 2006 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 25 May 2006 18:07:35 -0700 Subject: Shutdown wbnonmetal SNF 2006-05-25 17:15:23: De-contamination in progress Message-ID: Done. From yuhykr at snf.stanford.edu Thu May 25 22:07:14 2006 From: yuhykr at snf.stanford.edu (yuhykr at snf.stanford.edu) Date: Thu, 25 May 2006 22:07:14 -0700 Subject: Problem wbnonmetal SNF 2006-05-25 22:07:13: webnonmetal power is down by itself Message-ID: From pethe at snf.stanford.edu Thu May 25 22:53:52 2006 From: pethe at snf.stanford.edu (pethe at snf.stanford.edu) Date: Thu, 25 May 2006 22:53:52 -0700 Subject: Problem wbnonmetal SNF 2006-05-25 22:53:51: Heater seems to be off on right piranha hot pot Message-ID: The temperature reading did not change even after 10min. From dsoto at snf.stanford.edu Thu May 25 23:19:46 2006 From: dsoto at snf.stanford.edu (dsoto at snf.stanford.edu) Date: Thu, 25 May 2006 23:19:46 -0700 Subject: Problem wbnonmetal SNF 2006-05-25 23:19:46: bench powering down Message-ID: bench is spontaneously turning off. From jhaydon at snf.stanford.edu Fri May 26 06:41:42 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 26 May 2006 06:41:42 -0700 Subject: Problem wbnonmetal SNF 2006-05-25 22:53:51: Heater seems to be off on right piranha hot pot Message-ID: I miss wired it it works now From lindaw at snf.stanford.edu Fri May 26 08:57:07 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 26 May 2006 08:57:07 -0700 Subject: Problem wbnonmetal SNF 2006-05-26 08:57:06: right hot pot not heating Message-ID: Heater doesn't appear to be heating. After adding H2O2, got temp up to 85C, but then it started to cool down again. From lindaw at snf.stanford.edu Fri May 26 11:09:00 2006 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Fri, 26 May 2006 11:09:00 -0700 Subject: Problem wbnonmetal SNF 2006-05-26 11:08:58: water leaking out in front of spin dryer. Message-ID: pH7. There were already absorbent sheets under the bench. I moved one in front of the SRD to soak up the water leak. From iwjung at snf.stanford.edu Sat May 27 20:05:21 2006 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Sat, 27 May 2006 20:05:21 -0700 Subject: Problem wbnonmetal SNF 2006-05-27 20:05:20: unkown black residue on left hot pot Message-ID: From iwjung at snf.stanford.edu Sat May 27 20:49:03 2006 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Sat, 27 May 2006 20:49:03 -0700 Subject: Problem wbnonmetal SNF 2006-05-27 20:49:02: temperature reading seems incorrect in left hot pot Message-ID: low temp readings with fresh boiling bath From jhaydon at snf.stanford.edu Tue May 30 08:41:15 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 30 May 2006 08:41:15 -0700 Subject: Problem wbnonmetal SNF 2006-05-26 11:08:58: water leaking out in front of spin dryer. Message-ID: leak fixed From jhaydon at snf.stanford.edu Tue May 30 08:42:09 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 30 May 2006 08:42:09 -0700 Subject: Problem wbnonmetal SNF 2006-05-25 22:07:13: webnonmetal power is down by itself Message-ID: bench working now a miss wiring was probable cause From jhaydon at snf.stanford.edu Tue May 30 08:42:20 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 30 May 2006 08:42:20 -0700 Subject: Problem wbnonmetal SNF 2006-05-25 23:19:46: bench powering down Message-ID: From jhaydon at snf.stanford.edu Tue May 30 09:05:45 2006 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 30 May 2006 09:05:45 -0700 Subject: Problem wbnonmetal SNF 2006-05-26 08:57:06: right hot pot not heating Message-ID: loose connector