Problem wbnonmetal SNF 2007-03-06 17:41:07: Possible contamination of left dump-rinse

dans39 at snf.stanford.edu dans39 at snf.stanford.edu
Tue Mar 6 17:41:07 PST 2007


Possible contamination of left dump-rinser.  Pirahna did not entirely remove resist from wafer, and visible resist was left in the dump rinser. Right dump rinser not contaminated.




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