From jprovine at snf.stanford.edu  Tue May  8 23:55:19 2007
From: jprovine at snf.stanford.edu (jprovine at snf.stanford.edu)
Date: Tue, 8 May 2007 23:55:19 -0700
Subject: Problem wbnonmetal SNF 2007-05-08 23:55:18: wbnonmetal SRD not sealing well
Message-ID: <mailman.597.1357939064.26053.wbnonmetal-pcs@snf.stanford.edu>

it still seems to be doing a fine job rinsing and drying wafers, but the SRC at wgnonmetal has an audible sealing problem at the top of the door.



From jhaydon at snf.stanford.edu  Wed May  9 07:04:40 2007
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Wed, 9 May 2007 07:04:40 -0700
Subject: Problem wbnonmetal SNF 2007-05-08 23:55:18: wbnonmetal SRD not sealing well
Message-ID: <mailman.598.1357939064.26053.wbnonmetal-pcs@snf.stanford.edu>

seal seems to be ok