Problem wbnonmetal SNF 2008-11-21 11:06:26: SRD rinse time at 80s instead of 180s

skoh at snf.stanford.edu skoh at snf.stanford.edu
Fri Nov 21 11:06:26 PST 2008


Wafers may not be rinsed properly!  Noticed that rinse time was set at 80sec because the button for the hundreds place is broken.  The SRD was also left in manual instead of auto, so wafers may not be sufficiently rinsed.




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