From narii at snf.stanford.edu Sun Oct 4 14:46:34 2009 From: narii at snf.stanford.edu (narii at snf.stanford.edu) Date: Sun, 4 Oct 2009 14:46:34 -0700 Subject: Comment wbnonmetal SNF 2009-10-04 14:46:33: BOE 20:1 has crystals Message-ID: Seems like previous user didn't close the lid. From jhaydon at snf.stanford.edu Mon Oct 19 15:03:53 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 19 Oct 2009 15:03:53 -0700 Subject: Problem wbnonmetal SNF 2009-10-19 15:03:52: SRDs not working Message-ID: Both 4 and 6inch SRDs are not working, probable door valve problem. Use wbnitride SRD for 3or 4 inch wafers Uli left bench enabled. Should be up tomorrow. From jhaydon at snf.stanford.edu Tue Oct 20 10:59:00 2009 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Tue, 20 Oct 2009 10:59:00 -0700 Subject: Problem wbnonmetal SNF 2009-10-19 15:03:52: SRDs not working Message-ID: SRD fixed From latta at snf.stanford.edu Tue Oct 20 17:30:25 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:30:25 -0700 Subject: Comment wbnonmetal SNF 2009-08-02 17:48:33: right bath ok now Message-ID: archived From latta at snf.stanford.edu Tue Oct 20 17:30:38 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:30:38 -0700 Subject: Comment wbnonmetal SNF 2009-09-01 15:44:45: lots of fluorine crystals Message-ID: thanks From latta at snf.stanford.edu Tue Oct 20 17:31:16 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:31:16 -0700 Subject: Comment wbnonmetal SNF 2009-09-16 12:56:25: lots of fluorine crystals found Message-ID: cleaned up From latta at snf.stanford.edu Tue Oct 20 17:31:39 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:31:39 -0700 Subject: Comment wbnonmetal SNF 2009-09-17 10:14:51: liquid seen on topside of hood Message-ID: cleaned From latta at snf.stanford.edu Tue Oct 20 17:32:14 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:32:14 -0700 Subject: Comment wbnonmetal SNF 2009-09-10 14:32:21: Left dump rinser not holding water Message-ID: duplicate From latta at snf.stanford.edu Tue Oct 20 17:32:51 2009 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Tue, 20 Oct 2009 17:32:51 -0700 Subject: Comment wbnonmetal SNF 2009-10-04 14:46:33: BOE 20:1 has crystals Message-ID: archived From rik at snf.stanford.edu Mon Oct 26 17:34:07 2009 From: rik at snf.stanford.edu (rik at snf.stanford.edu) Date: Mon, 26 Oct 2009 17:34:07 -0700 Subject: Problem wbnonmetal SNF 2009-10-26 17:34:07: Left H2SO4 tank level sensor malfunctioning Message-ID: Does not allow the heater to be turned on despite full level From jwc at snf.stanford.edu Tue Oct 27 10:12:52 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 27 Oct 2009 10:12:52 -0700 Subject: Problem wbnonmetal SNF 2009-10-26 17:34:07: Left H2SO4 tank level sensor malfunctioning Message-ID: From jwc at snf.stanford.edu Tue Oct 27 10:17:57 2009 From: jwc at snf.stanford.edu (jwc at snf.stanford.edu) Date: Tue, 27 Oct 2009 10:17:57 -0700 Subject: Problem wbnonmetal SNF 2009-09-25 08:02:21: left dump rinser not holding water Message-ID: