Problem wbnonmetal SNF 2009-10-19 15:03:52: SRDs not working

jhaydon at snf.stanford.edu jhaydon at snf.stanford.edu
Mon Oct 19 15:03:53 PDT 2009


Both 4 and 6inch SRDs are not working, probable door valve problem. Use wbnitride SRD for 3or 4 inch wafers Uli left bench enabled. Should be up tomorrow.




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