From uli at snf.stanford.edu Fri Aug 6 11:45:10 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 6 Aug 2010 11:45:10 -0700 Subject: Comment wbnonmetal SNF 2010-08-06 11:45:10: Lots of white crystals around 6:1 BOE tank!!! Message-ID: Cleaned From latta at snf.stanford.edu Fri Aug 6 13:18:15 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:18:15 -0700 Subject: Comment wbnonmetal SNF 2010-07-06 02:18:35: right sulfric tank left half drained Message-ID: archived From latta at snf.stanford.edu Fri Aug 6 13:18:38 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:18:38 -0700 Subject: Comment wbnonmetal SNF 2010-07-17 21:36:45: 20:1 BOE empty Message-ID: ok- archived From latta at snf.stanford.edu Fri Aug 6 13:19:14 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:19:14 -0700 Subject: Problem wbnonmetal SNF 2010-06-28 19:37:11: 50:1 HF tank need decontamination Message-ID: archived From latta at snf.stanford.edu Fri Aug 6 13:20:23 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:20:23 -0700 Subject: Comment wbnonmetal SNF 2010-06-21 12:16:52: Both sulfric baths were left drained. Message-ID: No reason to fill a bath unless you are going to use it.... From latta at snf.stanford.edu Fri Aug 6 13:20:40 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:20:40 -0700 Subject: Problem wbnonmetal SNF 2010-06-14 14:36:47: broken wafer in 20:1 BOE. Message-ID: cleaned- archived From latta at snf.stanford.edu Fri Aug 6 13:21:32 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:21:32 -0700 Subject: Problem wbnonmetal SNF 2010-07-28 12:08:31: low liquid level Message-ID: Under observation. Please report any problems... From latta at snf.stanford.edu Fri Aug 6 13:21:52 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:21:52 -0700 Subject: Comment wbnonmetal SNF 2010-05-14 10:05:23: dryer has been washed for three times Message-ID: From latta at snf.stanford.edu Fri Aug 6 13:22:20 2010 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Aug 2010 13:22:20 -0700 Subject: Comment wbnonmetal SNF 2010-05-14 09:35:00: wafer broken in the bottom dryer Message-ID: Has been cleaned From wonukjo at snf.stanford.edu Fri Aug 6 19:01:51 2010 From: wonukjo at snf.stanford.edu (wonukjo at snf.stanford.edu) Date: Fri, 6 Aug 2010 19:01:51 -0700 Subject: Comment wbnonmetal SNF 2010-08-06 19:01:51: liquid on the bench Message-ID: some liquid found between the right pot and the back wall. tried to clean as much as I could. From arion at snf.stanford.edu Wed Aug 11 19:10:22 2010 From: arion at snf.stanford.edu (arion at snf.stanford.edu) Date: Wed, 11 Aug 2010 19:10:22 -0700 Subject: Comment wbnonmetal SNF 2010-08-11 19:10:21: brown spots Message-ID: There are brown spots between the two pirannha baths. I tried to clean them with di and the N2 gun but I was unsuccessful. From jaehlee at snf.stanford.edu Wed Aug 11 22:30:07 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Wed, 11 Aug 2010 22:30:07 -0700 Subject: Comment wbnonmetal SNF 2010-08-11 22:30:07: dropped a piece in right bath Message-ID: A small piece of SiC has been dropped to the right bath. It would be great if I can have this piece back. However, this piece is clean so don't worry to use this bath. - Jae From jaehlee at snf.stanford.edu Wed Aug 11 22:30:44 2010 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Wed, 11 Aug 2010 22:30:44 -0700 Subject: Problem wbnonmetal SNF 2010-08-11 22:30:43: dropped a piece in right bath Message-ID: I am just reporting this as a problem instead of comment From uli at snf.stanford.edu Thu Aug 12 11:15:59 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 12 Aug 2010 11:15:59 -0700 Subject: Comment wbnonmetal SNF 2010-08-12 11:15:59: 6 inch SRD Message-ID: Time and rpm were not right. We recommend rinse time 180 sec at 400 rpm and dry time 240 sec at 1800 rpm. From uli at snf.stanford.edu Thu Aug 12 14:26:13 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 12 Aug 2010 14:26:13 -0700 Subject: Problem wbnonmetal SNF 2010-08-11 22:30:43: dropped a piece in right bath Message-ID: cleaned From uli at snf.stanford.edu Thu Aug 12 14:26:21 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 12 Aug 2010 14:26:21 -0700 Subject: Comment wbnonmetal SNF 2010-08-11 22:30:07: dropped a piece in right bath Message-ID: cleaned From lindaohara at snf.stanford.edu Fri Aug 13 10:40:19 2010 From: lindaohara at snf.stanford.edu (lindaohara at snf.stanford.edu) Date: Fri, 13 Aug 2010 10:40:19 -0700 Subject: Comment wbnonmetal SNF 2010-08-13 10:40:18: Hotspot Clean Message-ID: ASML CSE Saeed is coming at 13:00 to clean the hotspot and re test From xzhuan1 at snf.stanford.edu Tue Aug 17 17:45:56 2010 From: xzhuan1 at snf.stanford.edu (xzhuan1 at snf.stanford.edu) Date: Tue, 17 Aug 2010 17:45:56 -0700 Subject: Problem wbnonmetal SNF 2010-08-17 17:45:56: left hot pot is messy Message-ID: somebody made a mess around the left hot pot. what is the stuff? it needs to be cleaned off. From uli at snf.stanford.edu Wed Aug 18 10:58:58 2010 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Wed, 18 Aug 2010 10:58:58 -0700 Subject: Problem wbnonmetal SNF 2010-08-17 17:45:56: left hot pot is messy Message-ID: cleaned From xuanwu at snf.stanford.edu Tue Aug 31 23:01:20 2010 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Tue, 31 Aug 2010 23:01:20 -0700 Subject: Problem wbnonmetal SNF 2010-08-31 23:01:19: Crystals near BOE tanks Message-ID: There were crystals near the BOE tanks when I came to the bench.