From sgchong at snf.stanford.edu  Thu Dec  2 01:53:51 2010
From: sgchong at snf.stanford.edu (sgchong at snf.stanford.edu)
Date: Thu, 2 Dec 2010 01:53:51 -0800
Subject: Comment wbnonmetal SNF 2010-12-02 01:53:51: wet empty cassette found in dryer
Message-ID: <mailman.991.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

A wet empty cassette was found in the spin dryer without any wafers and with the H-bar facing out.  Put back in box labelled with a yellow "ETCH" sticker.



From grahamab at snf.stanford.edu  Tue Dec  7 07:54:50 2010
From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu)
Date: Tue, 7 Dec 2010 07:54:50 -0800
Subject: Comment wbnonmetal SNF 2010-12-07 07:54:50: found BOE crystals on 6:1 lid handle
Message-ID: <mailman.992.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

second morning in a row I've found it like this.



From maurice at snf.stanford.edu  Tue Dec  7 14:15:58 2010
From: maurice at snf.stanford.edu (maurice at snf.stanford.edu)
Date: Tue, 7 Dec 2010 14:15:58 -0800
Subject: Problem wbnonmetal SNF 2010-12-07 14:15:57: 6" dryer not working
Message-ID: <mailman.993.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>




From xuanwu at snf.stanford.edu  Tue Dec  7 22:17:49 2010
From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu)
Date: Tue, 7 Dec 2010 22:17:49 -0800
Subject: Comment wbnonmetal SNF 2010-12-07 22:17:48: Crystals in the HF part of the bench
Message-ID: <mailman.994.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

Was there when I got there.



From uli at snf.stanford.edu  Wed Dec  8 11:55:38 2010
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Wed, 8 Dec 2010 11:55:38 -0800
Subject: Comment wbnonmetal SNF 2010-12-08 11:55:38: Cleaned crystals around 6:1 BOE
Message-ID: <mailman.995.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>




From barlian at snf.stanford.edu  Fri Dec 10 14:42:37 2010
From: barlian at snf.stanford.edu (barlian at snf.stanford.edu)
Date: Fri, 10 Dec 2010 14:42:37 -0800
Subject: Problem wbnonmetal SNF 2010-12-10 14:42:37: wafer broken
Message-ID: <mailman.996.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

wafer broken (into two big pieces) in the 6:1 BOE bath



From lindaw at snf.stanford.edu  Wed Dec 15 13:51:37 2010
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Wed, 15 Dec 2010 13:51:37 -0800
Subject: Problem wbnonmetal SNF 2010-12-15 13:51:36: large chunks of broken wafer stuck to walls
Message-ID: <mailman.997.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

Large chunks of broken wafer stuck to walls of 6:1 BOE bath.