From bchui at snf.stanford.edu  Tue May 11 15:08:55 2010
From: bchui at snf.stanford.edu (bchui at snf.stanford.edu)
Date: Tue, 11 May 2010 15:08:55 -0700
Subject: Problem wbnonmetal SNF 2010-05-11 15:08:54: Second dump-rinse from the left is dead
Message-ID: <mailman.931.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>




From narii at snf.stanford.edu  Thu May 13 21:08:48 2010
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Thu, 13 May 2010 21:08:48 -0700
Subject: Comment wbnonmetal SNF 2010-05-13 21:08:48: Dirty around Sulfuric acid bath
Message-ID: <mailman.932.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

Brown stains - Looks like resist - are all around Sulfuric acid bath



From yjhuo at snf.stanford.edu  Fri May 14 09:35:00 2010
From: yjhuo at snf.stanford.edu (yjhuo at snf.stanford.edu)
Date: Fri, 14 May 2010 09:35:00 -0700
Subject: Comment wbnonmetal SNF 2010-05-14 09:35:00: wafer broken in the bottom dryer
Message-ID: <mailman.933.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

Wafer breaks into 3 pieces. all of them are removed from the dryer. may still have small dusts. 
Sorry for the inconvenience. 



From yjhuo at snf.stanford.edu  Fri May 14 10:05:23 2010
From: yjhuo at snf.stanford.edu (yjhuo at snf.stanford.edu)
Date: Fri, 14 May 2010 10:05:23 -0700
Subject: Comment wbnonmetal SNF 2010-05-14 10:05:23: dryer has been washed for three times
Message-ID: <mailman.934.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

dryer has been washed for three times. hope all the dust are cleaned out.



From jhaydon at snf.stanford.edu  Fri May 14 10:13:11 2010
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Fri, 14 May 2010 10:13:11 -0700
Subject: Problem wbnonmetal SNF 2010-05-11 15:08:54: Second dump-rinse from the left is dead
Message-ID: <mailman.935.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

dumprinser appears to work



From cursive at snf.stanford.edu  Wed May 19 21:29:50 2010
From: cursive at snf.stanford.edu (cursive at snf.stanford.edu)
Date: Wed, 19 May 2010 21:29:50 -0700
Subject: Problem wbnonmetal SNF 2010-05-19 21:29:50: dryer can't dry well
Message-ID: <mailman.936.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

After drying wafers. still water on them.



From jhaydon at snf.stanford.edu  Thu May 20 07:39:16 2010
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Thu, 20 May 2010 07:39:16 -0700
Subject: Problem wbnonmetal SNF 2010-05-19 21:29:50: dryer can't dry well
Message-ID: <mailman.937.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

dry RPMs were set very low (400 RPM )they should be around 1800 -2000 RPMs



From narii at snf.stanford.edu  Sat May 22 16:57:53 2010
From: narii at snf.stanford.edu (narii at snf.stanford.edu)
Date: Sat, 22 May 2010 16:57:53 -0700
Subject: Comment wbnonmetal SNF 2010-05-22 16:57:52: Lot of white crystals around BOE bath
Message-ID: <mailman.938.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

Looks like someone made a splash. 



From jwpchen at snf.stanford.edu  Sat May 22 21:09:59 2010
From: jwpchen at snf.stanford.edu (jwpchen at snf.stanford.edu)
Date: Sat, 22 May 2010 21:09:59 -0700
Subject: Comment wbnonmetal SNF 2010-05-22 21:09:58: bench was left dirty
Message-ID: <mailman.939.1357939067.26053.wbnonmetal-pcs@snf.stanford.edu>

previous user reported HF crystals but didn't clean up. reporting it does not relieve your responsibility... benchtop now rinsed