From grahamab at snf.stanford.edu  Mon Aug  1 08:45:25 2011
From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu)
Date: Mon, 1 Aug 2011 08:45:25 -0700
Subject: Comment wbnonmetal SNF 2011-08-01 08:45:24: BOE crystals all over both BOE baths
Message-ID: <mailman.1051.1357939068.26053.wbnonmetal-pcs@snf.stanford.edu>

cleaned up.  



From lindaw at snf.stanford.edu  Mon Aug  1 14:25:36 2011
From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu)
Date: Mon, 1 Aug 2011 14:25:36 -0700
Subject: Comment wbnonmetal SNF 2011-08-01 14:25:36: There is an Etch box missing a cassette
Message-ID: <mailman.1052.1357939068.26053.wbnonmetal-pcs@snf.stanford.edu>




From ylyang at snf.stanford.edu  Sun Aug  7 22:09:21 2011
From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu)
Date: Sun, 7 Aug 2011 22:09:21 -0700
Subject: Problem wbnonmetal SNF 2011-08-07 22:09:21: someone may hve put BOE into 50:1 bench 
Message-ID: <mailman.1053.1357939068.26053.wbnonmetal-pcs@snf.stanford.edu>

I use 50:1 HF ro remove native oxide, but all the oxide is gone. Maybe someone put BOE in this bench.   He/she should drain it or leave a note
I spend one day to process my wafe, but now I need to do the process that I did one week ago.



From uli at snf.stanford.edu  Mon Aug  8 18:36:49 2011
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Mon, 8 Aug 2011 18:36:49 -0700
Subject: Problem wbnonmetal SNF 2011-08-07 22:09:21: someone may hve put BOE into 50:1 bench 
Message-ID: <mailman.1054.1357939068.26053.wbnonmetal-pcs@snf.stanford.edu>

Rinsed bath and refilled it with 50:1 HF.



From jhaydon at snf.stanford.edu  Thu Aug 11 15:24:05 2011
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Thu, 11 Aug 2011 15:24:05 -0700
Subject: Problem wbnonmetal SNF 2011-07-10 14:57:26: Dump rinser lid cracked
Message-ID: <mailman.1055.1357939068.26053.wbnonmetal-pcs@snf.stanford.edu>

lid replaced



From jhaydon at snf.stanford.edu  Thu Aug 11 15:31:31 2011
From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu)
Date: Thu, 11 Aug 2011 15:31:31 -0700
Subject: Problem wbnonmetal SNF 2011-07-26 19:19:09: Someone left broken wafer pieces in left piranha bath
Message-ID: <mailman.1056.1357939068.26053.wbnonmetal-pcs@snf.stanford.edu>

wafer pieces picked up



From uli at snf.stanford.edu  Thu Aug 11 15:55:18 2011
From: uli at snf.stanford.edu (uli at snf.stanford.edu)
Date: Thu, 11 Aug 2011 15:55:18 -0700
Subject: Comment wbnonmetal SNF 2011-08-01 14:25:36: There is an Etch box missing a cassette
Message-ID: <mailman.1057.1357939068.26053.wbnonmetal-pcs@snf.stanford.edu>

cassette has been found



From cfchiang at snf.stanford.edu  Fri Aug 19 22:54:59 2011
From: cfchiang at snf.stanford.edu (cfchiang at snf.stanford.edu)
Date: Fri, 19 Aug 2011 22:54:59 -0700
Subject: Comment wbnonmetal SNF 2011-08-19 22:54:59: metal or plastic flakes?
Message-ID: <mailman.1058.1357939068.26053.wbnonmetal-pcs@snf.stanford.edu>

Found the 6:1 BOE bath open with its lid sitting aside. It seems there are some metal or plastic flakes in the bath.