From nharjee at snf.stanford.edu Fri Jul 1 17:29:08 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Fri, 1 Jul 2011 17:29:08 -0700 Subject: Problem wbnonmetal SNF 2011-07-01 17:29:08: Teflon runners in SRD need replacing Message-ID: Teflon is cracked and touches wafers when inserting/removing cassettes. From uli at snf.stanford.edu Tue Jul 5 11:31:19 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 5 Jul 2011 11:31:19 -0700 Subject: Comment wbnonmetal SNF 2011-07-05 11:31:18: Cleaned crystals around 6:1BOE bath Message-ID: From nharjee at snf.stanford.edu Sun Jul 10 14:57:26 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sun, 10 Jul 2011 14:57:26 -0700 Subject: Problem wbnonmetal SNF 2011-07-10 14:57:26: Dump rinser lid cracked Message-ID: Found the lid of the dump rinser in front of the right hot pot is cracked at the top left corner. From nharjee at snf.stanford.edu Sun Jul 10 15:42:52 2011 From: nharjee at snf.stanford.edu (nharjee at snf.stanford.edu) Date: Sun, 10 Jul 2011 15:42:52 -0700 Subject: Comment wbnonmetal SNF 2011-07-10 15:42:52: Cleaned HF crystals Message-ID: Near 6:1 pot and dump rinser. From grahamab at snf.stanford.edu Fri Jul 15 13:41:49 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 15 Jul 2011 13:41:49 -0700 Subject: Comment wbnonmetal SNF 2011-07-15 13:41:48: dump rinser left open with cassette in it Message-ID: Found the bench disabled with a cassette (with handle on it) sitting in an open dump rinser. Not sure why someone would leave the bench in this state. From grahamab at snf.stanford.edu Fri Jul 15 13:44:14 2011 From: grahamab at snf.stanford.edu (grahamab at snf.stanford.edu) Date: Fri, 15 Jul 2011 13:44:14 -0700 Subject: Problem wbnonmetal SNF 2011-07-15 13:44:13: found BOE crystals on underside of clear shelf Message-ID: From uli at snf.stanford.edu Fri Jul 15 16:03:49 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 15 Jul 2011 16:03:49 -0700 Subject: Problem wbnonmetal SNF 2011-07-15 13:44:13: found BOE crystals on underside of clear shelf Message-ID: cleaned From uli at snf.stanford.edu Fri Jul 15 16:05:35 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Fri, 15 Jul 2011 16:05:35 -0700 Subject: Problem wbnonmetal SNF 2011-06-04 11:42:55: found water droplets after SRD Message-ID: Ran 25 wafers, all came out dry. From ylyang at snf.stanford.edu Tue Jul 19 12:02:17 2011 From: ylyang at snf.stanford.edu (ylyang at snf.stanford.edu) Date: Tue, 19 Jul 2011 12:02:17 -0700 Subject: Problem wbnonmetal SNF 2011-07-19 12:02:17: water drops on wafers after spin dry Message-ID: I put 7 wafers into cassette and spin dry them. There are water drops on the wafer after spin dry. From lindaw at snf.stanford.edu Tue Jul 19 12:29:13 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Tue, 19 Jul 2011 12:29:13 -0700 Subject: Comment wbnonmetal SNF 2011-07-19 12:29:12: SRD sometimes leaving water droplets Message-ID: Perhaps the dry time needs to be increased from 240 seconds? From uli at snf.stanford.edu Tue Jul 19 17:57:00 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 19 Jul 2011 17:57:00 -0700 Subject: Problem wbnonmetal SNF 2011-07-19 12:02:17: water drops on wafers after spin dry Message-ID: Changed dry time from 240 to 300 sec. From uli at snf.stanford.edu Tue Jul 19 17:58:16 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 19 Jul 2011 17:58:16 -0700 Subject: Comment wbnonmetal SNF 2011-07-19 12:29:12: SRD sometimes leaving water droplets Message-ID: Changed dry time from 240 to 300 sec. From jhaydon at snf.stanford.edu Mon Jul 25 08:02:13 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 25 Jul 2011 08:02:13 -0700 Subject: Problem wbnonmetal SNF 2011-07-01 17:29:08: Teflon runners in SRD need replacing Message-ID: use the new SRD From jhaydon at snf.stanford.edu Mon Jul 25 08:10:40 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Mon, 25 Jul 2011 08:10:40 -0700 Subject: Comment wbnonmetal SNF 2011-07-25 08:10:40: Oops wrong wet bench Message-ID: Telon runner problem From srikantv at snf.stanford.edu Tue Jul 26 19:19:10 2011 From: srikantv at snf.stanford.edu (srikantv at snf.stanford.edu) Date: Tue, 26 Jul 2011 19:19:10 -0700 Subject: Problem wbnonmetal SNF 2011-07-26 19:19:09: Someone left broken wafer pieces in left piranha bath Message-ID: From lindaw at snf.stanford.edu Thu Jul 28 11:38:44 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 28 Jul 2011 11:38:44 -0700 Subject: Problem wbnonmetal SNF 2011-07-28 11:38:43: neither sulfuric bath will drain Message-ID: both the left and right hot pots will not drain. left temp 82.9C, right temp 83.2C. Did someone change the maximum drain temp down from 119.9C? From jhaydon at snf.stanford.edu Thu Jul 28 12:24:10 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Thu, 28 Jul 2011 12:24:10 -0700 Subject: Problem wbnonmetal SNF 2011-07-28 11:38:43: neither sulfuric bath will drain Message-ID: someone had turned off the industrial water From lindaw at snf.stanford.edu Thu Jul 28 12:36:41 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Thu, 28 Jul 2011 12:36:41 -0700 Subject: Comment wbnonmetal SNF 2011-07-28 12:36:40: removed broken wafer bits from left hot pot Message-ID: I removed all of the broken Si wafer bits from the left hot pot. Also jim fixed the drain issue for all of the hot pots.