From sclaussen at snf.stanford.edu Thu Nov 3 00:20:32 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Thu, 3 Nov 2011 00:20:32 -0700 Subject: Problem wbnonmetal SNF 2011-11-03 00:20:32: SRD not moving automatically from 1st to 2nd part of cycle Message-ID: Have to switch it from Auto to Man (and back to Auto) to get it to move on. From jasmine at snf.stanford.edu Thu Nov 3 16:05:21 2011 From: jasmine at snf.stanford.edu (jasmine at snf.stanford.edu) Date: Thu, 3 Nov 2011 16:05:21 -0700 Subject: Problem wbnonmetal SNF 2011-11-03 16:05:21: HF crystals all over the bench..tut tut Message-ID: From uli at snf.stanford.edu Thu Nov 3 17:03:37 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 3 Nov 2011 17:03:37 -0700 Subject: Problem wbnonmetal SNF 2011-11-03 16:05:21: HF crystals all over the bench..tut tut Message-ID: Cleaned. From uli at snf.stanford.edu Thu Nov 3 17:04:13 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 3 Nov 2011 17:04:13 -0700 Subject: Comment wbnonmetal SNF 2011-11-03 17:04:13: crystals around the BOE pots Message-ID: The wet bench nonmetal was found with crystals around the BOE pots, shield, and side wall. Users said they saw it in the morning but no one using the bench reported it on Coral or cleaned it up. This is not acceptable! In the future, if the bench is found in an unsafe condition, all the users who have used the bench between routine checks will be disqualified. All users have the responsibility to report and/or clean up the benches. From jhaydon at snf.stanford.edu Fri Nov 4 07:24:14 2011 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: Fri, 4 Nov 2011 07:24:14 -0700 Subject: Problem wbnonmetal SNF 2011-11-03 00:20:32: SRD not moving automatically from 1st to 2nd part of cycle Message-ID: SRD had not reached resistivty From lupin000 at snf.stanford.edu Fri Nov 4 13:05:40 2011 From: lupin000 at snf.stanford.edu (lupin000 at snf.stanford.edu) Date: Fri, 4 Nov 2011 13:05:40 -0700 Subject: Comment wbnonmetal SNF 2011-11-04 13:05:40: Running out of H2SO4 Message-ID: I couldn't finish filling up the left side of Piranha bench with H2SO4 because all the H2SO4 plastic containers have been spent. Please refill the empty storage. Thank you. From lindaw at snf.stanford.edu Mon Nov 7 13:05:57 2011 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Mon, 7 Nov 2011 13:05:57 -0800 Subject: Comment wbnonmetal SNF 2011-11-07 13:05:56: missing cassette? Message-ID: There are three cassette boxes, yet only two 4" wafer cassettes at Wbnonmetal. Odd that. From uli at snf.stanford.edu Mon Nov 7 16:40:14 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Mon, 7 Nov 2011 16:40:14 -0800 Subject: Comment wbnonmetal SNF 2011-11-07 13:05:56: missing cassette? Message-ID: found one cassette in wbnitride SRD From shott at snf.stanford.edu Tue Nov 8 14:08:36 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Tue, 8 Nov 2011 14:08:36 -0800 Subject: Problem wbnonmetal SNF 2011-11-08 14:08:35: Slow acid leak in drain piping behind wbnonmetal Message-ID: Tom from AGC (who has been doing all of the PCW flow meters and pressure gauges) showed me a location in the basement close to the east wall where there is about a 10 cm patch of dried acid-like material on the concrete floor and evidence of a very slow drip from the wye above it. I don't know if it is in the normal acid or HF drain system and I don't know whether it is leaking from the fittings down there or going through the aluminum plate in FW6 behind wbnonmetal but it definitely looks like an active, but slow, leak. Actually, based on the amount of crystallized acid on and around the aluminum plate in FW6, it seems most likely that the leak is up in the finger wall behind wbnonmetal and dripping down into the basement from there. The "white spot" in the basement is about 5 feet to the right of the milling machine. Naturally, gloves and other appropriate PPE should be used when anyone is investigating this .... it could be largely sulfuric but it could equally be a HF compound, I believe. In any event, we should take a careful look and see if we can determine whether it is the normal acid drain or the HF drain that is leaking. Thanks, John From gyama at snf.stanford.edu Thu Nov 10 08:55:06 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 10 Nov 2011 08:55:06 -0800 Subject: Problem wbnonmetal SNF 2011-11-10 08:55:05: ammonium flouride crystals @ Message-ID: 6:1 BOE 20:1 BOE From uli at snf.stanford.edu Thu Nov 10 15:42:57 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Thu, 10 Nov 2011 15:42:57 -0800 Subject: Problem wbnonmetal SNF 2011-11-10 08:55:05: ammonium flouride crystals @ Message-ID: Cleaned From uli at snf.stanford.edu Tue Nov 22 14:10:05 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:10:05 -0800 Subject: Comment wbnonmetal SNF 2010-08-06 11:45:10: Lots of white crystals around 6:1 BOE tank!!! Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:10:19 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:10:19 -0800 Subject: Comment wbnonmetal SNF 2010-08-06 19:01:51: liquid on the bench Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:10:33 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:10:33 -0800 Subject: Comment wbnonmetal SNF 2010-08-11 19:10:21: brown spots Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:11:05 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:11:05 -0800 Subject: Comment wbnonmetal SNF 2010-08-12 11:15:59: 6 inch SRD Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:11:20 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:11:20 -0800 Subject: Comment wbnonmetal SNF 2010-08-13 10:40:18: Hotspot Clean Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:11:27 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:11:27 -0800 Subject: Comment wbnonmetal SNF 2010-09-01 14:45:47: Brown spots Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:11:36 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:11:36 -0800 Subject: Comment wbnonmetal SNF 2010-09-13 11:01:51: is there a reason the left hot pot is empty? Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:11:55 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:11:55 -0800 Subject: Comment wbnonmetal SNF 2010-09-29 07:14:36: Wetbench left very messy... Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:12:06 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:12:06 -0800 Subject: Comment wbnonmetal SNF 2010-10-04 12:01:36: White crystals around 6:1 Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:12:15 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:12:15 -0800 Subject: Comment wbnonmetal SNF 2010-10-27 08:01:10: 6:1 BOE lid full of crystals Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:12:22 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:12:22 -0800 Subject: Comment wbnonmetal SNF 2010-11-22 09:12:13: HF Crystals on HF baths' lids Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:12:31 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:12:31 -0800 Subject: Comment wbnonmetal SNF 2010-12-02 01:53:51: wet empty cassette found in dryer Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:12:39 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:12:39 -0800 Subject: Comment wbnonmetal SNF 2010-12-07 07:54:50: found BOE crystals on 6:1 lid handle Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:12:45 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:12:45 -0800 Subject: Comment wbnonmetal SNF 2010-12-07 22:17:48: Crystals in the HF part of the bench Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:12:52 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:12:52 -0800 Subject: Comment wbnonmetal SNF 2010-12-08 11:55:38: Cleaned crystals around 6:1 BOE Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:13:00 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:13:00 -0800 Subject: Comment wbnonmetal SNF 2011-01-24 11:55:24: crystals around 6:1 BOE Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:13:11 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:13:11 -0800 Subject: Comment wbnonmetal SNF 2011-01-29 17:52:12: Left dump rinser working now Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:13:26 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:13:26 -0800 Subject: Comment wbnonmetal SNF 2011-02-08 06:20:54: Huge mess Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:13:41 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:13:41 -0800 Subject: Comment wbnonmetal SNF 2011-02-14 07:54:05: HF Crystals... Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:13:48 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:13:48 -0800 Subject: Comment wbnonmetal SNF 2011-02-23 11:57:00: lots of white crystals around 6:1BOE Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:13:57 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:13:57 -0800 Subject: Comment wbnonmetal SNF 2011-02-23 14:07:23: Where are all the 4" ETCH cassettes????? Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:14:03 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:14:03 -0800 Subject: Comment wbnonmetal SNF 2011-03-02 08:38:37: crystals around 6:1 BOE Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:14:12 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:14:12 -0800 Subject: Comment wbnonmetal SNF 2011-03-03 09:02:34: crystals again...including underside of splash guard Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:14:19 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:14:19 -0800 Subject: Comment wbnonmetal SNF 2011-03-05 14:31:04: crystals again Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:14:27 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:14:27 -0800 Subject: Comment wbnonmetal SNF 2011-03-09 08:55:25: more cyrstals Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:14:34 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:14:34 -0800 Subject: Comment wbnonmetal SNF 2011-03-30 17:31:26: Mess at 6:1 BOE Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:14:49 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:14:49 -0800 Subject: Comment wbnonmetal SNF 2011-04-12 09:06:47: found crystals around BOE Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:14:55 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:14:55 -0800 Subject: Comment wbnonmetal SNF 2011-04-21 13:22:43: acid crystal at boe 20:1 Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:15:03 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:15:03 -0800 Subject: Comment wbnonmetal SNF 2011-04-26 18:01:25: Cleaned crystals on 6:1BOE bath Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:15:14 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:15:14 -0800 Subject: Comment wbnonmetal SNF 2011-05-01 19:13:30: stain in wetbench Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:15:25 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:15:25 -0800 Subject: Comment wbnonmetal SNF 2011-05-02 11:07:18: stain plus huge centimeter sized crystals by 6:1BOE Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:15:35 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:15:35 -0800 Subject: Comment wbnonmetal SNF 2011-05-05 09:26:23: Lots of stains! Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:15:46 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:15:46 -0800 Subject: Comment wbnonmetal SNF 2011-05-06 09:56:41: ASML Demo Testing Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:16:01 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:16:01 -0800 Subject: Comment wbnonmetal SNF 2011-05-20 11:08:46: found SRD times changed Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:16:08 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:16:08 -0800 Subject: Comment wbnonmetal SNF 2011-07-05 11:31:18: Cleaned crystals around 6:1BOE bath Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:16:16 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:16:16 -0800 Subject: Comment wbnonmetal SNF 2011-07-10 15:42:52: Cleaned HF crystals Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:16:25 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:16:25 -0800 Subject: Comment wbnonmetal SNF 2011-07-15 13:41:48: dump rinser left open with cassette in it Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:16:31 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:16:31 -0800 Subject: Comment wbnonmetal SNF 2011-07-25 08:10:40: Oops wrong wet bench Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:16:44 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:16:44 -0800 Subject: Comment wbnonmetal SNF 2011-07-28 12:36:40: removed broken wafer bits from left hot pot Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:17:14 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:17:14 -0800 Subject: Comment wbnonmetal SNF 2011-08-01 08:45:24: BOE crystals all over both BOE baths Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:17:26 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:17:26 -0800 Subject: Comment wbnonmetal SNF 2011-08-19 22:54:59: metal or plastic flakes? Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:17:40 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:17:40 -0800 Subject: Comment wbnonmetal SNF 2011-09-16 15:08:59: broken wafer in the left bath Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:17:47 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:17:47 -0800 Subject: Comment wbnonmetal SNF 2011-09-17 15:41:31: Found 6:1 BOE bath in messy state Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:17:55 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:17:55 -0800 Subject: Comment wbnonmetal SNF 2011-09-30 08:48:38: HF crystals around 6:1 BOE Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:18:01 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:18:01 -0800 Subject: Comment wbnonmetal SNF 2011-10-12 09:39:06: HF crystal around BOE 6:1 Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:18:08 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:18:08 -0800 Subject: Comment wbnonmetal SNF 2011-10-13 11:08:52: HF Crystals in BOE 6:1 Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:18:19 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:18:19 -0800 Subject: Comment wbnonmetal SNF 2011-10-20 18:48:10: one cassete is missing. I put the correwsponding into one dump rinser Message-ID: archived From uli at snf.stanford.edu Tue Nov 22 14:18:53 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:18:53 -0800 Subject: Comment wbnonmetal SNF 2011-10-31 10:56:11: HF crystalls all over the edge of the bath Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:19:01 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:19:01 -0800 Subject: Comment wbnonmetal SNF 2011-11-03 17:04:13: crystals around the BOE pots Message-ID: cleaned From uli at snf.stanford.edu Tue Nov 22 14:19:16 2011 From: uli at snf.stanford.edu (uli at snf.stanford.edu) Date: Tue, 22 Nov 2011 14:19:16 -0800 Subject: Comment wbnonmetal SNF 2011-11-04 13:05:40: Running out of H2SO4 Message-ID: archived From gyama at snf.stanford.edu Thu Nov 24 06:35:24 2011 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Thu, 24 Nov 2011 06:35:24 -0800 Subject: Comment wbnonmetal SNF 2011-11-24 06:35:24: ammonium flouride crystals @ 20:1/6:1 BOE Message-ID: From jaehlee at snf.stanford.edu Thu Nov 24 11:30:11 2011 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Thu, 24 Nov 2011 11:30:11 -0800 Subject: Comment wbnonmetal SNF 2011-11-24 11:30:10: HF crystals all around 20:1 and 6:1 Message-ID: cleaning now