Shutdown wbnonmetal SNF 2012-02-23 11:38:20: SRD spins forever

jwc at snf.stanford.edu jwc at snf.stanford.edu
Thu Feb 23 11:38:21 PST 2012


processing on wbnonmetal
Semitool rinse dryer display shows 9999 seconds after rinse 2 or 3.
resistivityh monitor displays 6 - 8.7 Mohms/cm
Possible problems with DI water or the sensor?
JWC




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